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Mártil de la Plaza, Ignacio and González Díaz, Germán and Martínez, F.L. and Selle, B. and Sieber, I. (1998) Influence of rapid thermal annealing processes on the properties of SiNx : H films deposited by the electron cyclotron resonance method. Journal of Non-Crystalline Solids, 227 (A). pp. 523-527. ISSN 0022-3093

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