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Study of microstructured indium oxide by cathodoluminescence and XPS microscopy

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Magdas, D.A. and Malestre, D. and Cremades Rodríguez, Ana Isabel and Gregorati, Luca and Piqueras de Noriega, Javier (2009) Study of microstructured indium oxide by cathodoluminescence and XPS microscopy. Superlattices and Microstructures, 45 (5 de M). pp. 429-434. ISSN 0749-6036

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Official URL: http://www.sciencedirect.com/science/article/pii/S0749603608001985


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Abstract

In this work sintered thick microcrystalline films as well as micro and nanostructures of In(2)O(3) have been studied. The results obtained by XPS microscopy show that the boundary regions of the microcrystalline films present a higher amount of oxygen, as well as a different O (1s) core level XPS spectrum with respect to the grains. CL images recorded at room temperature show that the emission is preferentially associated with the grain boundaries and the main emission band appeared at 1.9 eV in the recorded CL spectra. Core level and valence band spectromicroscopy measurements of the indium oxide arrows grown at the surface of the sintered InN revealed the incorporation of nitrogen, coming from the starting material. In these structures the N (1s) core level splits into two components, showing a higher amount of nitrogen in the pyramid surface than in the columns of the structures which correlates with an increase of CL intensity. (C) 2008 Elsevier Ltd. All rights reserved.


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©2008 Elsevier Ltd.
This work was supported by MEC (Project MAT2006-01259).
9th International Workshop on Beam Injection Assessment of Microstructure in Semiconductors (BIAMS 2008)(9. Toledo. 2008)

Uncontrolled Keywords:Ray Photoelectron-Spectroscopy, In2o3, Oxidation, Devices
Subjects:Sciences > Physics > Materials
ID Code:23030
Deposited On:07 Oct 2013 17:52
Last Modified:13 Feb 2018 15:34

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