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Optical characterization of surfaces by robust reflectance determination based on air-gap interference



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Quiroga Mellado, Juan Antonio y Martínez Antón, Juan Carlos y González Moreno, Ricardo (2004) Optical characterization of surfaces by robust reflectance determination based on air-gap interference. Applied Surface Science, 238 (1-4). pp. 380-384. ISSN 0169-4332

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URL Oficial: http://dx.doi.org/10.1016/j.apsusc.2004.05.157

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In this work we present an optical tool for characterizing the reflectance and polarimetric properties of surfaces. It uses only the image of the interference fringe pattern produced in a thin air-gap between the surface of interest and a glass surface acting as a reference. From only the contrast of the fringe pattern captured with a CCD we may obtain the reflectance of the surface, no need of measuring a reference beam. By taking two images with polarized light, we may get then the polarized reflectance R_p and R_s, but also the ellipsometric magnitude Δ, simply as a phase shift between fringes in p and s polarization. A sample of silicon with a thin layer of thermally grown silica is used to test the method.

Tipo de documento:Artículo
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© 2004 Elsevier B.V.
International Meeting on Applied Physics (APHYS) (1ª. 2003. Badajoz).
This work has obtained partial financial support from the project DPI.2001-1238 (MCYT, Spain).

Palabras clave:Photo-Interferometric Envelope Analysis, Newton Rings, Optical Characterization, Spectrophotometry
Materias:Ciencias > Física > Optica
Código ID:23092
Depositado:11 Oct 2013 19:08
Última Modificación:07 Feb 2014 10:56

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