Publication: Optical characterization of surfaces by robust reflectance determination based on air-gap interference
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2004-11-15
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Elsevier Science B. V.
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In this work we present an optical tool for characterizing the reflectance and polarimetric properties of surfaces. It uses only the image of the interference fringe pattern produced in a thin air-gap between the surface of interest and a glass surface acting as a reference. From only the contrast of the fringe pattern captured with a CCD we may obtain the reflectance of the surface, no need of measuring a reference beam. By taking two images with polarized light, we may get then the polarized reflectance R_p and R_s, but also the ellipsometric magnitude Δ, simply as a phase shift between fringes in p and s polarization. A sample of silicon with a thin layer of thermally grown silica is used to test the method.
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© 2004 Elsevier B.V.
International Meeting on Applied Physics (APHYS) (1ª. 2003. Badajoz).
This work has obtained partial financial support from the project DPI.2001-1238 (MCYT, Spain).
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