Publication: Cathodoluminescence study of ArF excimer laser-induced planarization of large grain diamond films
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1996-05-15
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American Institute of Physics
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Abstract
Planarization of large grain diamond films has been induced by 193 nm excimer laser irradiation. Secondary emission images and cathodoluminescence (CL) in the scanning electron microscope have been used to characterize-the irradiated area. Irradiation causes changes in the structure of defects involving nitrogen and vacancies. Evolution of the CL signal with the number of pulses indicates that the luminescence intensity tends to stabilize when a smooth film surface is obtained.
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© 1996 American Institute of Physics.
This work has been supported by DGICYT (Projects Nos. PB-93-1256 and HP94-098).
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