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In-situ scanning electron microscopy and atomic force microscopy Young's modulus determination of indium oxide microrods for micromechanical resonator applications

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Bartolomé, Javier and Hidalgo Alcalde, Pedro and Maestre Varea, David and Cremades Rodríguez, Ana Isabel and Piqueras de Noriega, Javier (2014) In-situ scanning electron microscopy and atomic force microscopy Young's modulus determination of indium oxide microrods for micromechanical resonator applications. Applied Physics Letters, 104 (16). ISSN 0003-6951

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Official URL: http://dx.doi.org/10.1063/1.4872461


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Abstract

Electric field induced mechanical resonances of In2O3 microrods are studied by in-situ measurements in the chamber of a scanning electron microscope. Young's moduli of rods with different cross-sectional shapes are calculated from the resonance frequency, and a range of values between 131 and 152GPa are obtained. A quality factor of 1180-3780 is measured from the amplitude-frequency curves, revealing the suitability of In2O3 microrods as micromechanical resonators. The Young's modulus, E, of one of the rods is also measured from the elastic response in the force-displacement curve recorded in an atomic force microscope. E values obtained by in-situ scanning electron microscopy and by atomic force microscopy are found to differ in about 8%. The results provide data on Young's modulus of In2O3 and confirm the suitability of in-situ scanning electron microscopy mechanical resonance measurements to investigate the elastic behavior of semiconductor microrods.


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© 2014 AIP Publishing LLC.
This work has been supported by MINECO (Project Nos. MAT 2012-31959 and CSD 2009-00013). J.B. acknowledges the financial support from Universidad Complutense de Madrid.

Uncontrolled Keywords:Crystalline Boron Nanowires, Elastic Properties, Zno Nanobelts, Mechanics
Subjects:Sciences > Physics > Materials
ID Code:27135
Deposited On:21 Oct 2014 08:17
Last Modified:21 Oct 2014 08:17

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