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High quality factor indium oxide mechanical microresonators

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Bartolomé, Javier and Cremades Rodríguez, Ana Isabel and Piqueras de Noriega, Javier (2015) High quality factor indium oxide mechanical microresonators. Applied physics letters, 107 (19). ISSN 0003-6951

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Official URL: http://dx.doi.org/10.1063/1.4935708


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Abstract

The mechanical resonance behavior of as-grown In_2O_3 microrods has been studied in this work by in-situ scanning electron microscopy (SEM) electrically induced mechanical oscillations. Indium oxide microrods grown by a vapor–solid method are naturally clamped to an aluminum oxide ceramic substrate, showing a high quality factor due to reduced energy losses during mechanical vibrations. Quality factors of more than (10)^5 and minimum detectable forces of the order of (10)^(16) N/Hz^(1/2) demonstrate their potential as mechanical microresonators for real applications. Measurements at low- vacuum using the SEM environmental operation mode were performed to study the effect of extrinsic damping on the resonators behavior. The damping coefficient has been determined as a function of pressure.


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©2015 AIP Publishing LLC.

This work has been supported by MINECO (Project Nos. MAT 2012-31959 and CSD 2009-00013). J.B. acknowledges the financial support from Universidad Complutense de Madrid.

Uncontrolled Keywords:Nanomechanical resonators; Cantilevers; Nanobelts; Growth; Nanowires; Resonance; Pressure; Diamond
Subjects:Sciences > Physics > Materials
Sciences > Physics > Solid state physics
ID Code:35241
Deposited On:26 Jan 2016 15:54
Last Modified:10 Dec 2018 15:09

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