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3D-form metrology of arbitrary optical surfaces by absorption in fluids

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Martínez Antón, Juan Carlos y Plaza Ortega, Juan Manuel y Alonso Fernández, José (2013) 3D-form metrology of arbitrary optical surfaces by absorption in fluids. Proceedings of SPIE, 8884 (88413). pp. 888413-1. ISSN 0277-786X

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URL Oficial: http://dx.doi.org/10.1117/12.2030508




Resumen

We present an imaging technique for the 3D-form metrology of optical surfaces. It is based on the optical absorption in fluids situated between the surface and a reference. An improved setup with a bi-chromatic light source is fundamental to obtain reliable topographic maps. It is able to measure any surface finish (rough or polished), form and slope and independently of scale. We present results focused on flat and spherical optical surfaces, arrays of lenses and with different surface finish (rough-polished). We achieve form accuracies from several nanometers to sub-lambda for sag departures from tens to hundred of microns. Therefore, it seems suitable for the quality control in the production of precision aspheric, freeform lenses and other complex shapes on transparent substrates, independently of the surface finish.


Tipo de documento:Artículo
Información Adicional:

Conference Volume 8884 - Optifab 2013, Julie L. Bentley, Matthias Pfaff; Rochester, New York, USA; October 14, 2013.
Copyright (2013) Society of Photo Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

Palabras clave:Absorption, Metrology, Lenses, Light sources, Optical surface metrology, TOPAF, profilometry, surface finish, ground surface, aspherics, free-form, steep slopes.
Materias:Ciencias > Física > Optica
Ciencias > Física > Superficies (Física)
Código ID:40426
Depositado:05 Dic 2016 10:42
Última Modificación:05 Dic 2016 10:42

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