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A robust method to determine the contact resistance using the van der Pauw set up

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González Díaz, Germán and Pastor, D. and García Hemme, Eric and Montero, D. and García Hernansanz, Rodrigo and Olea, J. and Prado Millán, Álvaro del and San Andres Serrano, Enrique and Mártil de la Plaza, Ignacio (2017) A robust method to determine the contact resistance using the van der Pauw set up. Measurement, 98 . pp. 151-158. ISSN 0263-2241

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Official URL: http://dx.doi.org/10.1016/j.measurement.2016.11.040


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Abstract

The van der Pauw method to calculate the sheet resistance and the mobility of a semiconductor is a pervasive technique both in the microelectronics industry and in the condensed matter science field. There are hundreds of papers dealing with the influence of the contact size, nonuniformities and other second order effects. In this paper we will develop a simple methodology to evaluate the error produced by finite size contacts, detect the presence of contact resistance, calculate it for each contact, and determine the linear or rectifying behavior of the contact. We will also calculate the errors produced by the use of voltmeters with finite input resistance in relation with the sample sheet resistance.


Item Type:Article
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© 2017 Elsevier B.V. Authors would like to acknowledge the CAI de Técnicas Físicas of the Universidad Complutense de Madrid for the metallic evaporations and sample etching. This work was partially supported by the Project MADRID-PV (Grant No. P2013/MAE-2780) funded by the Comunidad de Madrid and by the Spanish MINECO (Economic and Competitiviness Ministery) under grant TEC 2013- 41730-R Research by E. García-Hemme was also supported by a PICATA predoctoral fellowship of the Moncloa Campus of International Excellence (UCM-UPM). D. Pastor acknowledges the financial support to the grant EX-2010-0662 from the Spanish Science Ministry.

Uncontrolled Keywords:Resistivity
Subjects:Sciences > Physics > Electricity
Sciences > Physics > Electronics
ID Code:42549
Deposited On:08 May 2017 11:21
Last Modified:10 Dec 2018 14:57

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