Publication: Spatial characterization of light detectors with nanometric resolution
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2004-04-15
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SPIE
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Abstract
The miniaturization of light detectors in the visible and infrared has produced devices with micrometric and sub-micrometric spatial features. Some of these spatial features are closely linked with the physical mechanism of detection. An example of these devices is an optical antennas. To spatially characterize optical antennas it is necessary to scan a probe beam on the plane of the optical antenna. The mapping of this response is then treated and analyzed. When the response of the antenna is monitorized at visible or near-infrared frequencies, a sub-micron scanning step is necessary. In this paper we show the experimental set-up of a measurement station having a spatial resolution of 50 nanometers. This station is devoted to spatially characterize micrometric detectors, and specially optical antennas. The origin of the uncertainties of the measurement protocol is shown and practically analyzed. This station is also applied for characterizing the temporal, spectral, and polarization sensitivity specifications of light detectors with the previously mentioned resolution.
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Infrared Imaging Systems: Design, Analysis, Modeling, and Testing XV; Orlando, FL; United States; 14 April 2004 through 15 April 2004.
Copyright 2004 Society of Photo Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.