Publication: Micro-opto-electro-mechanical device based on flexible beta-Ga_2O_3 micro-lamellas
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Publication Date
2019-06-24
Authors
Peres, Marco
Fernandes, A.J.S.
Oliveira, F.J.
Alves, L.C.
Alves, E.
Monteiro, T.S.
Cardoso, S.
Méndez Martín, Bianchi
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Electrochemical Society
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Abstract
A thermal actuator based on thin flexible lamellas of Ga_2O_3 was designed in order to demonstrate the potential of this semiconductor for micro-opto-electro-mechanical applications (MOEMs). The working principle of these devices is based on the thermal expansion that induces a vertical movement resultant of the lamella elongation due the self-heating/Joule effect. Upon excitation with photons, electrons or ions, intrinsic luminescence bands associated with self-trapped excitons and donor-acceptor pair recombination dominate the emission spectrum. When a current passes through the device, simultaneously with the thermal expansion, this luminescence is strongly quenched. Based on systematic Photoluminescence and Raman studies as a function of temperature and as a function of the applied power it is demonstrated that the observed luminescence quenching is directly related with the Joule heating effect. This work presents for the first time a thermal actuator based on Ga_2O_3 and it intends to be a stimulus for future works on MOEMs applications based on this semiconductor.
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© The Authors 2019. Published by ECS.
Artículo firmado por más de diez autores.
This work was supported by the Portuguese Foundation for Science and Technology (FCT), under the projects UID/FIS/50010/2019 and PTDC/CTM-CTM/28011/2017, LISBOA-01-0145-FEDER-028011.