Publication: Topographic optical profilometry by absorption in liquids
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2012-12-17
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The Optical Society Of America
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Abstract
Optical absorbance within a liquid is used as a photometric probe to measure the topography of optical surfaces relative to a reference. The liquid fills the gap between the reference surface and the measuring surface. By comparing two transmission images at different wavelengths we can profile the height distribution in a simple and reliable way. The presented method handles steep surface slopes (<90 degrees) without difficulty. It adapts well to any field of view and height range (peak to valley). A height resolution in the order of the nanometer may be achieved and the height range can be tailored by adapting the concentration of water soluble dyes. It is especially appropriate for 3D profiling of transparent complex optical surfaces, like those found in micro-optic arrays and for Fresnel, aspheric or free-form lenses, which are very difficult to measure by other optical methods. We show some experimental results to validate its capabilities as a metrological tool and handling of steep surface slopes.
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© 2012 Optical Society of America.
This work has been developed within the framework of the project DPI2009-09023 financially supported by Spanish MICINN (Ministerio de Ciencia e Innovación).
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