Topographic optical profilometry by absorption in liquids



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Quiroga Mellado, Juan Antonio and Martínez Antón, Juan Carlos and Alonso Fernández, José and Gómez Pedrero, José Antonio (2012) Topographic optical profilometry by absorption in liquids. Optics Express, 20 (27). pp. 28631-28640. ISSN 1094-4087

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Optical absorbance within a liquid is used as a photometric probe to measure the topography of optical surfaces relative to a reference. The liquid fills the gap between the reference surface and the measuring surface. By comparing two transmission images at different wavelengths we can profile the height distribution in a simple and reliable way. The presented method handles steep surface slopes (<90 degrees) without difficulty. It adapts well to any field of view and height range (peak to valley). A height resolution in the order of the nanometer may be achieved and the height range can be tailored by adapting the concentration of water soluble dyes. It is especially appropriate for 3D profiling of transparent complex optical surfaces, like those found in micro-optic arrays and for Fresnel, aspheric or free-form lenses, which are very difficult to measure by other optical methods. We show some experimental results to validate its capabilities as a metrological tool and handling of steep surface slopes.

Item Type:Article
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© 2012 Optical Society of America.
This work has been developed within the framework of the project DPI2009-09023 financially supported by Spanish MICINN (Ministerio de Ciencia e Innovación).

Uncontrolled Keywords:Interferometry, Resolution
Subjects:Sciences > Physics > Optics
ID Code:22180
Deposited On:07 Jul 2013 16:46
Last Modified:07 Feb 2014 10:42

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