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Optical characterization of surfaces by robust reflectance determination based on air-gap interference

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Quiroga Mellado, Juan Antonio and Martínez Antón, Juan Carlos and González Moreno, Ricardo (2004) Optical characterization of surfaces by robust reflectance determination based on air-gap interference. Applied Surface Science, 238 (1-4). pp. 380-384. ISSN 0169-4332

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Official URL: http://dx.doi.org/10.1016/j.apsusc.2004.05.157




Abstract

In this work we present an optical tool for characterizing the reflectance and polarimetric properties of surfaces. It uses only the image of the interference fringe pattern produced in a thin air-gap between the surface of interest and a glass surface acting as a reference. From only the contrast of the fringe pattern captured with a CCD we may obtain the reflectance of the surface, no need of measuring a reference beam. By taking two images with polarized light, we may get then the polarized reflectance R_p and R_s, but also the ellipsometric magnitude Δ, simply as a phase shift between fringes in p and s polarization. A sample of silicon with a thin layer of thermally grown silica is used to test the method.


Item Type:Article
Additional Information:

© 2004 Elsevier B.V.
International Meeting on Applied Physics (APHYS) (1ª. 2003. Badajoz).
This work has obtained partial financial support from the project DPI.2001-1238 (MCYT, Spain).

Uncontrolled Keywords:Photo-Interferometric Envelope Analysis, Newton Rings, Optical Characterization, Spectrophotometry
Subjects:Sciences > Physics > Optics
ID Code:23092
Deposited On:11 Oct 2013 19:08
Last Modified:31 Dec 2020 00:01

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