Electron beam-induced current imaging of chemical vapor-deposited diamond films



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Cremades Rodríguez, Ana Isabel and Piqueras de Noriega, Javier and Schreck, M. (1997) Electron beam-induced current imaging of chemical vapor-deposited diamond films. Diamond and Related Materials, 6 (1). pp. 95-98. ISSN 0925-9635

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Official URL: http://www.sciencedirect.com/science/article/pii/S092596359600595X


Electron beam-induced current (EBIC) is applied to the characterization of chemical vapor-deposited (CVD) diamond films. EBIC contrast shows a strong dependence on the orientation of grains relative to the incident electron beam. This is due to the correspondence between certain faces of the diamond grains and enhanced recombination. Cathodoluminescence (CL) images enable identification of the (100) faces of the epitaxial layers as preferential radiative recombination sites, in agreement with the EBIC contrast shown by these films. The capability of the EBIC technique to study recombination processes with high spatial resolution as compared to CL, is analyzed in this work.

Item Type:Article
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© 1997 Elsevier Science S.A.
This work has been partially supported by DGICYT {Project PB93-1256). A.C. thanks the Universidad Complutense for a pre-doctoral grant. The authors thank Dr. R. Hessmer for growing the samples.

Uncontrolled Keywords:Cathodoluminescence, Defects, Luminescence, Impurities
Subjects:Sciences > Physics > Materials
ID Code:23592
Deposited On:21 Nov 2013 13:35
Last Modified:09 May 2016 15:10

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