Correlative SEM/STM study of local electronic properties in compound semiconductors



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Piqueras de Noriega, Javier and Panin, G.N. and Díaz-Guerra Viejo, Carlos and Hidalgo Alcalde, Pedro and Méndez Martín, Bianchi (1998) Correlative SEM/STM study of local electronic properties in compound semiconductors. Solid State Phenomena, 63-64 . pp. 273-282. ISSN 1012-0394

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The use of combined SEM/STM instruments enables to position the tunnel tip in the region of the sample to be investigated by STM or/and by scanning tunneling spectroscopy (STS). In this work a STM has been implemented in the chamber of a SEM provided with EBIC and CL detection systems. With this arrangement, correlative STM and SEM-EBIC or SEM-CL measurements of local electronic properties have been performed in different compound semiconductors as CdTe, CdxHg1-xTe, GaSb or ZnO. In particular, the electronic inhomogeneities of the sample were analyzed with nm resolution by current imaging tunneling spectroscopy (CITS) or using STM-REBIC contacts configuration, in areas with different recombination properties as imaged by the SEM beam injection techniques. CITS revealed local variations of the surface band gap in the defect or precipitate-rich areas, observed by EBIC and CL, and appears as a complementary technique to study local electronic properties at a finer scale than the SEM-based techniques.

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Uncontrolled Keywords:Scanning-Tunneling-Microscopy, Si(111)2x1 Surface, Grain-Boundaries, Spectroscopy, Luminescence, Ceramics
Subjects:Sciences > Physics > Materials
ID Code:24787
Deposited On:27 Mar 2014 18:55
Last Modified:09 Feb 2018 14:32

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