Publication: Micromachining of Diffractive Optical Elements Embedded in Bulk Fused Silica by Nanosecond Pulses
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2011-03-15
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IEEE - Inst. Electrical Electronics Engineers Inc.
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Abstract
Micro-optical devices embedded in transparent materials are usually manufactured focusing a pulsed laser in bulk fused silica. Under this condition, pulsewidth becomes the most important parameter that rules the size of the inscriptions. Ultrafast pulses (pico- and femtosecond pulses) avoid thermal effects and the results present a high efficiency. Nevertheless, nanosecond lasers are more available due the reduced costs. Therefore, a study of the optical behavior of embedded elements micromachined by nanosecond pulses is required. In this study, we show that this regime of pulses can still be used for engraving diffractive optical elements in transparent materials, regardless of the thermal damage. A Fresnel zone plate and a far-field beam shaper have been manufactured as an example of the functionality of these devices.
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© 2011 IEEE.
Manuscript received September 07, 2010; revised December 20, 2010; accepted December 30, 2010. Date of publication January 10, 2011; date of current version March 04, 2011. This work was supported by the Ministerio de Ciencia e Innovación under Project DPI2008-02391. The work of F. J. Salgado-Remacha was supported by the Ministerio de Ciencia e Innovación.
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[1] J. Turunen and F.Wyrowski, Diffractive Optics for Industrial and Commercial Applications, J. Turunen and F.Wyrowski, Eds. Berlin, Germany: Akademie-Verlag, 1997.
[2] H. P. Herzig, Micro-Optics. Elements, Systems and Applications, H. P. Herzig, Ed. London, U.K.: Taylor & Francis, 1997.
[3] T. J. Suleski, “Fabrication trends for free-space microoptics,” J. Lightw. Technol., vol. 23, no. 2, pp. 633–646, Feb. 2005.
[4] I. Moreno, A. Martínez-García, L. Nieradko, J. Albero, and C. Gorecki, “Low cost production of computer-generated holograms: From design to optical evaluation ,” J. Eur. Opt. Soc. Rap. Public., vol. 5, no. 10011, pp. 1–9, Apr. 2010.
[5] C. B. Schaffer, A. Brodeur, J. F. García, and E. Mazur, “Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy,” Opt. Lett., vol. 26, pp. 93–95, Jan. 2001.
[6] S. Juodkazis, A. V. Rode, E. G. Gamaly, S. Matsuo, and H. Misawa, “Recording and reading of three-dimensional optical memory in
glasses,” Appl. Phys. B, vol. 77, pp. 361–368, Aug. 2003.
[7] V. Mizeikis, K. K. Seet, S. Juodkazis, and H. Misawa, “Three-dimensional woodpile photonic crystal templates for the infrared spectral range ,” Opt. Lett., vol. 29, pp. 2061–2063, Sep. 2004.
[8] B. Hopp, T. Smausz, and M. Bereznat, “Processing of transparent materials using visible nanosecond laser pulses,” App. Phys. A, vol. 87, pp. 77–79, Jan. 2007.
[9] W. Watanabe, D. Kuroda, and K. Itoh, “Fabrication of Fresnel zone plate embedded in silica glass by femtosecond laser pulses ,” Opt. Exp., vol. 10, pp. 978–983, Sep. 2002.
[10] E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T. H. Her, J. P. Callan, and E. Mazur, “Three-dimensional optical storage inside transparent materials,” Opt. Lett., vol. 21, pp. 2023–2025, Dec. 1996.
[11] T. Tanaka and S. Kawata, “Comparison of recording densities in threedimensional optical storage systems: Multilayered bit recording versus angularly multiplexed holographic recording,” J. Opt. Soc. Amer. A, vol. 13, pp. 935–943, May 1996.
[12] Y. Li, Y. Dou, R. An, H. Yang, and Q. Gong, “Permanent computer-generated holograms ebedded in silica glass by femtosecond laser pulses ,” Opt. Exp., vol. 13, pp. 2433–2438, Apr. 2005.
[13] S.-H. Cho, W.-S. Chang, K.-R. Kim, and J.-W. Hong, “Femtosecond laser embedded grating micromachining of flexiblePDMS plates,” Opt. Commun., vol. 282, pp. 1317–1321, Apr. 2009.
[14] E. G. Gamaly, A. V. Rode, and B. Luther-Davies, “Ablation of solids by femtosecond laser: Ablation mechanism and ablation thresholds for metals and dielectrics,” Phys. Plasmas, vol. 9, pp. 949–957, Mar. 2002.
[15] P. Gibbon, Short Pulse Laser Interactions With Matter. London, U.K.: Imperial College Press, 2005.
[16] O. Efimov, S. Juodkazis, and H. Misawa, “Intrinsic single- and multiple-pulse laser-induced damage in silicate glasses in the femtosecond-to-nanosecond region,” Phys. Rev. A, vol. 69, pp. 042903-1–042903-7, Apr. 2004.
[17] E. Hecht, “Fresnel diffraction,” in Optics. Reading, MA: Addison Wesley, 2002, ch. 10, sec. sec. 3.
[18] F. Shen and A. Wang, “Fast-Fourier-transform based numerical integration method for the Rayleigh-Sommerfeld diffraction formula,” Appl. Opt., vol. 45, pp. 1102–1110, Feb. 2006.
[19] F. Wyrowski, “Iterative quantization of digital amplitude holograms,” App. Opt., vol. 28, pp. 3864–3870, Sep. 1989.