Publication: Design of two-dimensional zero reference codes by means of a global optimization method
Loading...
Official URL
Full text at PDC
Publication Date
2005-05-30
Advisors (or tutors)
Editors
Journal Title
Journal ISSN
Volume Title
Publisher
The Optical Society Of America
Citations
Exportar
Abstract
A method to obtain the absolute measure of the position is by means of the autocorrelation of two zero reference marks. In one-axis measurement systems one dimensional mark are used and the design of these marks is relatively complex. When the movement is in two-axes, two dimensional reference marks are required and they are even harder to design. We report a method of global optimization to calculate the optimal two dimensional zero reference marks which generate the reference signal with the highest central peak. This method proves to be a powerful tool for solving this problem.
Description
© 2005 Optical Society of America.
This research was supported by the national research program, Project No. DPI2004-7334
UCM subjects
Unesco subjects
Keywords
Citation
1. M. C. King and D. H. Berry, “Photolithografic mask alignment using moiré techniques” Appl. Opt. 11, 2455-2459 (1972).
2. V. T. Chitnis and Y. Uchida, “Moiré signals in reflection” Optics Communications 54, 207-211 (1985).
3. Xiangyang Yang and Chunyong Yin, “A new method for the design of zero reference marks for grating measurement systems” J. Phys. E Sci. Instrum. 19, 34-7 (1986).
4. Li Yajun, “Autocorrelation function of a bar code system” J. Mod. Opt. 34, 1571-5 (1987).
5. Li Yajun, “Optical valve using bar codes” Optik 79, 67-74 (1988).
6. J. Sáez-Landete, J. Alonso, E. Bernabeu, “Design of zero reference codes by means of a global optimization method” Op. Ex. 13, 195-201 (2005), http://www.opticsexpress.org/abstract.cfm?URI=OPEX-13-1-195.
7. Y. Chen, W. Huang and X. Dang, “Design and analysis of two-dimensional zero-reference marks for alignment systems” Review of Scientific Instruments, 74, 3549-53 (2003).
8. D. R. Jones, C. D. Perttunen, and B. E. Stuckman. “Lipschitzian Optimization without the Lipschitz Constant” J. Optim. Theory Appl. 79, 157-181 (1993).
9. Donald R. Jones. DIRECT Global optimization algorithm. Encyclopedia of Optimization. (Kluwer Academic Publishers, Dordrecht, 2001).
10. Bjorkman, Mattias and Holmstrom, Kenneth. “Global Optimization Using the DIRECT Algorithm in Matlab” Advanced Modeling and Optimization, 1, 17-37 (1999).
11. Daniel E. Finkel and C. T. Kelley. “Convergence analysis of the DIRECT algorithm” Optimization Online (2004).
12. J. M. Gablonsky. DIRECT Version 2.0 User Guide. (CRSC Technical Report, Raleigh, 2001).