Comparison between optical techniques and confocal microscopy for defect detection on thin wires

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Siegmann, Philip and Sánchez Brea, Luis Miguel and Martínez Antón, Juan Carlos and Bernabeu Martínez, Eusebio (2004) Comparison between optical techniques and confocal microscopy for defect detection on thin wires. Applied Surface Science, 238 (1-4). pp. 375-379. ISSN 0169-4332

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Official URL: http://dx.doi.org/10.1016/j.apsusc.2004.05.240




Abstract

Conventional microscopy techniques, such as atomic force microscopy (AFM), scanning electron microscopy (SEM), and confocal microscopy (CM) are not suitable for on-line surface inspection of fine metallic wires. In the recent years, some optical techniques have been developed to be used for those tasks. However, they need a rigorous validation. In this work, we have used confocal microscopy to obtain the topography z(x,y) of wires with longitudinal defects, such as dielines. The topography has been used to predict the light scattered by the wire. These simulations have been compared with experimental results, showing a good agreement.


Item Type:Article
Additional Information:

© 2004 Elsevier B.V.
The authors thank Javier Alda for his valuable suggestions. This article is financed with DPI2001-1238 project.

Uncontrolled Keywords:Surface-Deffects
Subjects:Sciences > Physics > Optics
ID Code:26746
Deposited On:25 Sep 2014 10:46
Last Modified:31 Dec 2020 00:03

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