High quality factor indium oxide mechanical microresonators



Downloads per month over past year

Bartolomé Vílchez, Javier and Cremades Rodríguez, Ana Isabel and Piqueras de Noriega, Javier (2015) High quality factor indium oxide mechanical microresonators. Applied physics letters, 107 (19). ISSN 0003-6951

[thumbnail of CremadesAna67 libre.pdf]

Official URL: http://dx.doi.org/10.1063/1.4935708


The mechanical resonance behavior of as-grown In_2O_3 microrods has been studied in this work by in-situ scanning electron microscopy (SEM) electrically induced mechanical oscillations. Indium oxide microrods grown by a vapor–solid method are naturally clamped to an aluminum oxide ceramic substrate, showing a high quality factor due to reduced energy losses during mechanical vibrations. Quality factors of more than (10)^5 and minimum detectable forces of the order of (10)^(16) N/Hz^(1/2) demonstrate their potential as mechanical microresonators for real applications. Measurements at low- vacuum using the SEM environmental operation mode were performed to study the effect of extrinsic damping on the resonators behavior. The damping coefficient has been determined as a function of pressure.

Item Type:Article
Additional Information:

©2015 AIP Publishing LLC.

This work has been supported by MINECO (Project Nos. MAT 2012-31959 and CSD 2009-00013). J.B. acknowledges the financial support from Universidad Complutense de Madrid.

Uncontrolled Keywords:Nanomechanical resonators; Cantilevers; Nanobelts; Growth; Nanowires; Resonance; Pressure; Diamond
Subjects:Sciences > Physics > Materials
Sciences > Physics > Solid state physics
ID Code:35241
Deposited On:26 Jan 2016 15:54
Last Modified:22 Jan 2020 12:37

Origin of downloads

Repository Staff Only: item control page