Far field of binary phase gratings with errors in the height of the strips



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Rico-García, José María and Sánchez Brea, Luis Miguel (2009) Far field of binary phase gratings with errors in the height of the strips. In Modeling Aspects in Optical Metrology II. Proceedings of SPIE (7390). SPIE, Bellingham (USA), pp. 739019-1. ISBN 9780819476739

[thumbnail of Far field binary_ 2009-SPIE739019_1.pdf]

Official URL: http://dx.doi.org/10.1117/12.827580


Diffraction gratings are not always ideal but, due to the fabrication process, several errors can be produced. In this work we show that when the strips of a binary phase diffraction grating present certain randomness in their height, the intensity of the diffraction orders varies with respect to that obtained with a perfect grating. To show this, we perform an analysis of the mutual coherence function and then, the intensity distribution at the far field is obtained. In addition to the far field diffraction orders, a "halo" that surrounds the diffraction order is found, which is due to the randomness of the strips height.

Item Type:Book Section
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Copyright 2009. Society of Photo Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

Conference on Modeling Aspects in Optical Metrology II; Munich, GERMANY; JUN 15-16, 2009.

Uncontrolled Keywords:Polarization gratings ; Light-scattering ; Rough strips ; Diffraction ; Demultiplexer ; Surfaces
Subjects:Sciences > Physics > Optics
Medical sciences > Optics > Optical materials
ID Code:38631
Deposited On:08 Sep 2016 10:20
Last Modified:08 Sep 2016 10:20

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