Micromachined silicon lenses for terahertz applications



Downloads per month over past year

Bueno, Juan and López Camacho, Elena and Silva-López, Manuel and Rico-García, José María and Llombart, N and Alda, Javier and Costa-Krämer, José Luis (2013) Micromachined silicon lenses for terahertz applications. Infrared Physics & Technology, 61 . pp. 144-148. ISSN 1350-4495

[thumbnail of Micromachined silicon_Elsevier_2013-editor.pdf] PDF
Restringido a Repository staff only


Official URL: http://dx.doi.org/10.1016/j.infrared.2013.08.002


Silicon microlenses are a very important tool for coupling terahertz (THz) radiation into antennas and detectors in integrated circuits. They can be used in a large array structures at this frequency range reducing considerably the crosstalk between the pixels. Drops of photoresist have been deposited and their shape transferred into the silicon by means of a Reactive Ion Etching (RIE) process. Large silicon lenses with a few mm diameter (between 1.5 and 4.5 mm) and hundreds of μm height (between 50 and 350 μm) have been fabricated. The surface of such lenses has been characterized using Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM), resulting in a surface roughness of about ∼3 μm, good enough for any THz application. The beam profile at the focal plane of such lenses has been measured at a wavelength of 10.6 μm using a tomographic knife-edge technique and a CO2 laser.

Item Type:Article
Additional Information:

Received 4 May 2012, Available online 22 August 2013

Uncontrolled Keywords:Microfabricated lenses; Silicon lenses; Beam pattern; Surface characterisation; THz spectroscopy
Subjects:Sciences > Physics > Materials
Medical sciences > Optics > Geometrical and instumental optics
Medical sciences > Optics > Lasers
ID Code:38641
Deposited On:08 Sep 2016 11:46
Last Modified:19 Sep 2016 10:46

Origin of downloads

Repository Staff Only: item control page