3D-form metrology of arbitrary optical surfaces by absorption in fluids



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Martínez Antón, Juan Carlos and Plaza Ortega, Juan Manuel and Alonso Fernández, José (2013) 3D-form metrology of arbitrary optical surfaces by absorption in fluids. Proceedings of SPIE, 8884 (88413). pp. 888413-1. ISSN 0277-786X

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Official URL: http://dx.doi.org/10.1117/12.2030508


We present an imaging technique for the 3D-form metrology of optical surfaces. It is based on the optical absorption in fluids situated between the surface and a reference. An improved setup with a bi-chromatic light source is fundamental to obtain reliable topographic maps. It is able to measure any surface finish (rough or polished), form and slope and independently of scale. We present results focused on flat and spherical optical surfaces, arrays of lenses and with different surface finish (rough-polished). We achieve form accuracies from several nanometers to sub-lambda for sag departures from tens to hundred of microns. Therefore, it seems suitable for the quality control in the production of precision aspheric, freeform lenses and other complex shapes on transparent substrates, independently of the surface finish.

Item Type:Article
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Conference Volume 8884 - Optifab 2013, Julie L. Bentley, Matthias Pfaff; Rochester, New York, USA; October 14, 2013.
Copyright (2013) Society of Photo Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

Uncontrolled Keywords:Absorption, Metrology, Lenses, Light sources, Optical surface metrology, TOPAF, profilometry, surface finish, ground surface, aspherics, free-form, steep slopes.
Subjects:Sciences > Physics > Optics
Sciences > Physics > Surfaces (Physics)
ID Code:40426
Deposited On:05 Dec 2016 10:42
Last Modified:05 Dec 2016 10:42

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