Micro-opto-electro-mechanical device based on flexible beta-Ga_2O_3 micro-lamellas



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Peres, Marco and Fernandes, A.J.S. and Oliveira, F.J. and Alves, L.C. and Alves, E. and Monteiro, T.S. and Cardoso, S. and Alonso Orts, Manuel and Nogales Díaz, Emilio and Méndez Martín, Bianchi (2019) Micro-opto-electro-mechanical device based on flexible beta-Ga_2O_3 micro-lamellas. ECS journal of solid state science and technology, 8 (7). pp. 3235-3241. ISSN 2162-8769

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Official URL: http://dx.doi.org/10.1149/2.0441907jss


A thermal actuator based on thin flexible lamellas of Ga_2O_3 was designed in order to demonstrate the potential of this semiconductor for micro-opto-electro-mechanical applications (MOEMs). The working principle of these devices is based on the thermal expansion that induces a vertical movement resultant of the lamella elongation due the self-heating/Joule effect. Upon excitation with photons, electrons or ions, intrinsic luminescence bands associated with self-trapped excitons and donor-acceptor pair recombination dominate the emission spectrum. When a current passes through the device, simultaneously with the thermal expansion, this luminescence is strongly quenched. Based on systematic Photoluminescence and Raman studies as a function of temperature and as a function of the applied power it is demonstrated that the observed luminescence quenching is directly related with the Joule heating effect. This work presents for the first time a thermal actuator based on Ga_2O_3 and it intends to be a stimulus for future works on MOEMs applications based on this semiconductor.

Item Type:Article
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© The Authors 2019. Published by ECS.
Artículo firmado por más de diez autores.
This work was supported by the Portuguese Foundation for Science and Technology (FCT), under the projects UID/FIS/50010/2019 and PTDC/CTM-CTM/28011/2017, LISBOA-01-0145-FEDER-028011.

Uncontrolled Keywords:Single-crystals; Optical-absorption; Luminescence; Field
Subjects:Sciences > Physics > Materials
Sciences > Physics > Solid state physics
ID Code:57106
Deposited On:27 Sep 2019 16:59
Last Modified:27 Sep 2019 16:59

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